C.A. Savran, A.W. Sparks, J. Sihler, J. Li, W-C. Wu, D.E. Berlin, T.P. Burg, J. Fritz, M.A. Schmidt, S.R. Manalis, “Fabrication and Characterization of a micromechanical sensor for differential detection of nanoscale motions,” Journal of Microelectromechanical Systems, vol. 11, no. 6, pp. 703-708, Dec. 2002

C.A. Savran, A.W. Sparks, J. Sihler, J. Li, W-C. Wu, D.E. Berlin, T.P. Burg, J. Fritz, M.A. Schmidt, S.R. Manalis, “Fabrication and Characterization of a micromechanical sensor for differential detection of nanoscale motions,” Journal of Microelectromechanical Systems, vol. 11, no. 6, pp. 703-708, Dec. 2002 PDF